Process evaluation is an evaluation that contributes to the development of mechanisms, processes and implementation strategies that affect the success of the intervention and the aspects that need improvement in order to maximize the implementation of an intervention. Process evaluation ensures that multidimensional interventions in the field of nursing are presented with sufficient accuracy, dose and quality by examining all aspects of the intervention, the mechanisms of action that affect the intervention, and the context of the intervention. Thus, it contributes to the formation of scientific knowledge and evidence for the development of nursing practices and care, with strategies to improve the effectiveness of the intervention applied in nursing research. Although well designed experimental studies, also known as outcome evaluation studies, have been included in the literature in recent years, it is seen that studies on process evaluation are limited. This review is planned to provide perspective on the concept of process evaluation, the basic components and stages of process evaluation, and to emphasize the importance of process evaluation in nursing research.